- Title
- Vibration control of a novel tube scanner using piezoelectric strain-induced voltage
- Creator
- Yong, Yuen Kuan; Moheimani, S. O. Reza
- Relation
- 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Proceedings of the IEEE/ASME International Conference on Advanced Intelligent Mechatronics 2009 (Singapore 14-17 July, 2009) p. 1070-1075
- Publisher Link
- http://dx.doi.org/10.1109/AIM.2009.5229728
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2009
- Description
- Piezoelectric tube scanners are widely used in nanopositioning applications such as in scanning probe microscopy. Capacitive or inductive sensors are used to provide feedback to improve bandwidth and accuracy of these tube scanners. However, these sensors contain certain noise densities which restrict the bandwidth of the closed loop system if nanometer resolution is required. The use of piezoelectric strain-induced voltage as a measurement signal has been recently proposed to provide feedback with a noise profile of up to three orders of magnitude better than capacitive sensors. This technique uses a quadrant of the electrode for actuation and the opposite quadrant for sensing. The major drawbacks of this arrangement are that the travel range of the tube is reduced by half and the tube is not driven symmetrically; thus the tube is not a collocated system. In this article, a novel electrode pattern of a tube scanner which addresses the above issues and allows for simultaneous actuation and sensing is presented. By using the piezoelectric strain voltage as measurement, an Integral Resonant Control (IRC) method combined with a feedforward inversion technique is implemented to achieve high-speed and accurate scanning performances of the tube.
- Subject
- closed loop systems; feedback; nanopositioning; scanning probe microscopy; vibration control
- Identifier
- http://hdl.handle.net/1959.13/918728
- Identifier
- uon:8694
- Identifier
- ISBN:9781424428533
- Rights
- Copyright © 2009 IEEE. Reprinted from the Proceedings of the IEEE/ASME International Conference on Advanced Intelligent Mechatronics 2009. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of University of Newcastle's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.
- Language
- eng
- Full Text
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